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Materials Science in Semiconductor Processing provides a unique forum for the discussion of novel processing, applications and theoretical studies of functional materials and devices for (opto)electronics, sensors, detectors, biotechnology and dark-green energy.

Each consequence will aim to provide a snapshot of electric current insights, new achievements, breakthroughs and hereafter trends in such various fields as microelectronics, free energy conversion and storage, communications, biotechnology, (photo)catalysis, nano- and thin-film technology, hybrid and composite materials, chemic processing, vapor-phase deposition, device fabrication, and modelling, which are the backbone of advanced semiconductor processing and applications.

Coverage will include: advanced lithography for submicron devices; etching and related topics; ion implantation; harm development and related bug; plasma and thermal CVD; rapid thermal processing; advanced metallization and interconnect schemes; thin dielectric layers, oxidation; sol-gel processing; chemical bath and (electro)chemical deposition; chemical compound semiconductor processing; new non-oxide materials and their applications; (macro)molecular and hybrid materials; molecular dynamics, ab-initio methods, Monte Carlo, etc.; new materials and processes for discrete and integrated circuits; magnetic materials and spintronics; heterostructures and quantum devices; engineering of the electrical and optical backdrop of semiconductors; crystal growth mechanisms; reliability, defect density, intrinsic impurities and defects.Submit your manuscript

Your Paper Your Manner

We now differentiate betwixt the requirements for new and revised submissions. You may choose to submit your manuscript equally a single Word or PDF file to be used in the refereeing procedure. Only when your paper is at the revision stage, will you be requested to put your paper in to a 'correct format' for acceptance and provide the items required for the publication of your article.
To discover out more, delight visit the Preparation section below.

Materials Science in Semiconductor Processing provides a unique and much needed forum for the word of experimental and theoretical materials research stimulated by and practical to semiconductor processing.

Each issue will aim to provide a snapshot of current comprehension, new achievements, breakthroughs and futurity trends in such fields as ion implantation, improvidence and gettering, process and equipment modelling, metallization and interconnects, packaging, etc, which are the backbone of semiconductor device processing.

Coverage volition include: avant-garde lithography for submicron devices; etching and related topics; ion implantation for dopant engineering; damage development and related issues; plasma and thermal CVD; rapid thermal processing; ultra depression energy implantation: physics, limitations and perspectives; gettering procedures for ULSI; advanced metallization and interconnects schemes; thin dielectric layer, oxidation; cleaning procedures for ULSI devices; compound semiconductor processing; physical modelling of processing (ion implantation, metal deposition, oxidation, etching, etc.): molecular dynamics, ab-initio methods, Monte Carlo, etc.; new concrete models in commercial simulation platforms for the design and modelling of avant-garde devices; equipment modelling; new materials and processes for detached and integrated circuits; heterostructures and quantum devices; engineering of the electrical and optical the properties of semiconductors; crystal growth: mechanisms, reliability, defect density intrinsic impurities and defects.

Types of paper

Types of contributions: Original research papers, reviews, letters to the editor.


Original material: Submission of an article implies that the work described has not been published previously (except in the course of an abstract or as part of a published lecture or bookish thesis), that it is not nether consideration for publication elsewhere, that its publication is canonical by all authors and that, if accepted, it will non be published elsewhere in the same form, in English or in any other linguistic communication, without the written consent of the Publisher.

Submission checklist

You tin can employ this list to carry out a final check of your submission before you lot ship it to the periodical for review. Please check the relevant section in this Guide for Authors for more details.

Ensure that the following items are nowadays:

One writer has been designated as the corresponding writer with contact details:
• Email accost
• Total postal address

All necessary files have been uploaded:
Manuscript:
• Include keywords
• All figures (include relevant captions)
• All tables (including titles, description, footnotes)
• Ensure all figure and table citations in the text match the files provided
• Bespeak conspicuously if color should exist used for any figures in impress
Graphical Abstracts / Highlights files (where applicable)
Supplemental files (where applicable)

Farther considerations
• Manuscript has been 'spell checked' and 'grammer checked'
• All references mentioned in the Reference List are cited in the text, and vice versa
• Permission has been obtained for utilize of copyrighted material from other sources (including the Internet)
• A competing interests statement is provided, even if the authors accept no competing interests to declare
• Journal policies detailed in this guide have been reviewed
• Referee suggestions and contact details provided, based on journal requirements

For farther information, visit our Support Center.

When submitting the revised manuscript, please brand sure that yous upload the final version of the paper. Delight remove the old version(s) of the manuscript before submitting the revised version.

Declaration of competing interest

Corresponding authors, on behalf of all the authors of a submission, must disembalm any financial and personal relationships with other people or organizations that could inappropriately influence (bias) their work. Examples of potential conflicts of interest include employment, consultancies, stock ownership, honoraria, paid skilful testimony, patent applications/registrations, and grants or other funding. All authors, including those without competing interests to declare, should provide the relevant information to the corresponding author (which, where relevant, may specify they have zip to declare). Corresponding authors should and then use this tool to create a shared statement and upload to the submission organisation at the Attach Files step. Delight do not convert the .docx template to another file type. Author signatures are not required.

Submission proclamation and verification

Submission of an article implies that the work described has not been published previously (except in the course of an abstract, a published lecture or academic thesis, see 'Multiple, redundant or concurrent publication' for more than information), that information technology is not nether consideration for publication elsewhere, that its publication is approved by all authors and tacitly or explicitly by the responsible authorities where the work was carried out, and that, if accustomed, it volition non exist published elsewhere in the same form, in English or in any other language, including electronically without the written consent of the copyright-holder. To verify originality, your article may exist checked past the originality detection service Crossref Similarity Check.

Preprints
Please note that preprints can be shared anywhere at whatever time, in line with Elsevier'due south sharing policy. Sharing your preprints due east.g. on a preprint server will non count equally prior publication (see 'Multiple, redundant or concurrent publication' for more than information).

Use of inclusive language

Inclusive language acknowledges diversity, conveys respect to all people, is sensitive to differences, and promotes equal opportunities. Content should make no assumptions nigh the behavior or commitments of whatever reader; comprise nada which might imply that ane individual is superior to some other on the grounds of age, gender, race, ethnicity, culture, sexual orientation, disability or health condition; and apply inclusive language throughout. Authors should ensure that writing is free from bias, stereotypes, slang, reference to dominant culture and/or cultural assumptions. We propose to seek gender neutrality by using plural nouns ("clinicians, patients/clients") equally default/wherever possible to avoid using "he, she," or "he/she." We recommend avoiding the apply of descriptors that refer to personal attributes such as age, gender, race, ethnicity, culture, sexual orientation, inability or health condition unless they are relevant and valid. When coding terminology is used, we recommend to avert offensive or exclusionary terms such as "master", "slave", "blacklist" and "whitelist". We suggest using alternatives that are more than appropriate and (self-) explanatory such every bit "primary", "secondary", "blocklist" and "allowlist". These guidelines are meant as a point of reference to help place appropriate language only are past no ways exhaustive or definitive.

Author contributions

For transparency, nosotros encourage authors to submit an author statement file outlining their individual contributions to the paper using the relevant CRediT roles: Conceptualization; Data curation; Formal analysis; Funding acquisition; Investigation; Methodology; Project administration; Resources; Software; Supervision; Validation; Visualization; Roles/Writing - original draft; Writing - review & editing. Authorship statements should be formatted with the names of authors first and CRediT office(south) following. More details and an example.

Changes to authorship

Authors are expected to consider carefully the list and order of authors before submitting their manuscript and provide the definitive listing of authors at the fourth dimension of the original submission. Any add-on, deletion or rearrangement of author names in the authorship listing should be made only earlier the manuscript has been accepted and just if approved past the journal Editor. To asking such a change, the Editor must receive the following from the respective author: (a) the reason for the alter in author list and (b) written confirmation (e-mail, letter of the alphabet) from all authors that they concur with the addition, removal or rearrangement. In the case of improver or removal of authors, this includes confirmation from the author being added or removed.
Merely in exceptional circumstances will the Editor consider the addition, deletion or rearrangement of authors afterward the manuscript has been accepted. While the Editor considers the request, publication of the manuscript volition be suspended. If the manuscript has already been published in an online event, whatsoever requests approved past the Editor will issue in a corrigendum.

Article transfer service
This journal is part of our Article Transfer Service. This means that if the Editor feels your article is more suitable in one of our other participating journals, then you may be asked to consider transferring the article to one of those. If you lot agree, your article will exist transferred automatically on your behalf with no need to reformat. Please note that your article will be reviewed again by the new journal. More information.

Copyright

Upon credence of an article, authors volition be asked to complete a 'Journal Publishing Understanding' (encounter more data on this). An eastward-mail will be sent to the corresponding author confirming receipt of the manuscript together with a 'Journal Publishing Agreement' form or a link to the online version of this agreement.

Subscribers may reproduce tables of contents or prepare lists of articles including abstracts for internal circulation within their institutions. Permission of the Publisher is required for resale or distribution outside the institution and for all other derivative works, including compilations and translations. If excerpts from other copyrighted works are included, the writer(south) must obtain written permission from the copyright owners and credit the source(s) in the article. Elsevier has preprinted forms for use by authors in these cases.

For gold open access articles: Upon acceptance of an article, authors volition be asked to complete a 'License Agreement' (more information). Permitted tertiary party reuse of aureate open admission manufactures is determined by the writer'south choice of user license.

Author rights
As an author you (or your employer or institution) have certain rights to reuse your work. More information.

Elsevier supports responsible sharing
Observe out how you can share your research published in Elsevier journals.

Role of the funding source

You are requested to identify who provided financial support for the conduct of the research and/or grooming of the article and to briefly describe the role of the sponsor(south), if whatever, in study design; in the collection, analysis and interpretation of data; in the writing of the written report; and in the decision to submit the commodity for publication. If the funding source(s) had no such involvement, information technology is recommended to state this.

Elsevier Researcher University
Researcher Academy is a free due east-learning platform designed to support early and mid-career researchers throughout their research journey. The "Learn" environment at Researcher Academy offers several interactive modules, webinars, downloadable guides and resource to guide you through the process of writing for research and going through peer review. Feel free to use these free resources to amend your submission and navigate the publication process with ease.

Linguistic communication (usage and editing services)
Please write your text in good English (American or British usage is accepted, merely non a mixture of these). Authors who feel their English language language manuscript may crave editing to eliminate possible grammatical or spelling errors and to conform to correct scientific English may wish to apply the English Language Editing service available from Elsevier's Author Services.

Submission

Our online submission organisation guides you stepwise through the process of entering your commodity details and uploading your files. The organisation converts your article files to a unmarried PDF file used in the peer-review procedure. Editable files (eastward.1000., Discussion, LaTeX) are required to typeset your article for final publication. All correspondence, including notification of the Editor'southward determination and requests for revision, is sent by e-mail.

Submit your article
Please submit your article via https://www.editorialmanager.com/mssp/default.aspx

Suggesting reviewers
Delight submit the names and institutional email addresses of several potential reviewers.

You lot should not suggest reviewers who are colleagues, or who take co-authored or collaborated with you during the last three years. Editors exercise not invite reviewers who take potential competing interests with the authors. Further, in order to provide a broad and balanced cess of the work, and ensure scientific rigor, please suggest diverse candidate reviewers who are located in different countries/regions from the author group. Also consider other variety attributes e.g. gender, race and ethnicity, career stage, etc. Finally, you should non include existing members of the journal's editorial team, of whom the periodical are already enlightened.

Note: the editor decides whether or not to invite your suggested reviewers.

Queries

For questions about the editorial process (including the condition of manuscripts nether review) or for technical support on submissions, delight visit our Support Center.

NEW SUBMISSIONS

Submission to this periodical proceeds totally online and yous will exist guided stepwise through the cosmos and uploading of your files. The system automatically converts your files to a single PDF file, which is used in the peer-review process.
Every bit part of the Your Newspaper Your Way service, y'all may choose to submit your manuscript as a single file to be used in the refereeing process. This tin exist a PDF file or a Give-and-take document, in any format or lay-out that can be used past referees to evaluate your manuscript. It should contain high plenty quality figures for refereeing. If you prefer to do so, you may even so provide all or some of the source files at the initial submission. Please note that individual figure files larger than ten MB must be uploaded separately.

References
In that location are no strict requirements on reference formatting at submission. References tin can be in whatsoever fashion or format equally long as the style is consistent. Where applicable, writer(s) name(south), journal title/volume title, chapter championship/article championship, year of publication, volume number/book chapter and the article number or pagination must be nowadays. Use of DOI is highly encouraged. The reference fashion used by the journal volition be applied to the accepted article by Elsevier at the proof stage. Note that missing data will be highlighted at proof phase for the author to correct.

Formatting requirements
At that place are no strict formatting requirements but all manuscripts must contain the essential elements needed to convey your manuscript, for example Abstract, Keywords, Introduction, Materials and Methods, Results, Conclusions, Artwork and Tables with Captions.
If your article includes any Videos and/or other Supplementary textile, this should be included in your initial submission for peer review purposes.
Divide the commodity into clearly defined sections.

Figures and tables embedded in text
Please ensure the figures and the tables included in the single file are placed adjacent to the relevant text in the manuscript, rather than at the bottom or the top of the file. The corresponding caption should be placed directly below the figure or table.

Peer review

This journal operates a single anonymized review process. All contributions will be initially assessed by the editor for suitability for the periodical. Papers deemed suitable are then typically sent to a minimum of two independent skilful reviewers to appraise the scientific quality of the paper. The Editor is responsible for the last decision regarding credence or rejection of articles. The Editor's decision is final. Editors are not involved in decisions virtually papers which they have written themselves or accept been written by family members or colleagues or which relate to products or services in which the editor has an interest. Any such submission is subject to all of the journal's usual procedures, with peer review handled independently of the relevant editor and their inquiry groups. More information on types of peer review.

REVISED SUBMISSIONS

Employ of word processing software
Regardless of the file format of the original submission, at revision you must provide the states with an editable file of the entire article. Go on the layout of the text equally unproblematic as possible. Most formatting codes volition be removed and replaced on processing the article. The electronic text should exist prepared in a mode very similar to that of conventional manuscripts (see besides the Guide to Publishing with Elsevier). See too the section on Electronic artwork.
To avoid unnecessary errors you lot are strongly advised to use the 'spell-check' and 'grammar-check' functions of your word processor.

LaTeX
You are recommended to use the latest Elsevier article class to prepare your manuscript and BibTeX to generate your bibliography.
Our Guidelines has total details.

Subdivision - numbered sections
Carve up your article into clearly divers and numbered sections. Subsections should be numbered ane.1 (then 1.1.ane, 1.1.two, ...), 1.two, etc. (the abstruse is non included in section numbering). Use this numbering also for internal cross-referencing: do not just refer to 'the text'. Whatsoever subsection may be given a cursory heading. Each heading should appear on its own split line.

Introduction
State the objectives of the work and provide an adequate background, fugitive a detailed literature survey or a summary of the results.

Material and methods
Provide sufficient details to allow the work to be reproduced by an independent researcher. Methods that are already published should be summarized, and indicated past a reference. If quoting straight from a previously published method, employ quotation marks and also cite the source. Any modifications to existing methods should besides be described.

Experimental
Provide sufficient details to allow the piece of work to be reproduced past an independent researcher. Methods that are already published should be summarized, and indicated by a reference. If quoting direct from a previously published method, employ quotation marks and as well cite the source. Any modifications to existing methods should also be described.

Theory/calculation
A Theory section should extend, not repeat, the background to the commodity already dealt with in the Introduction and lay the foundation for further work. In contrast, a Calculation section represents a practical development from a theoretical ground.

Results
Results should be clear and concise.

Discussion
This should explore the significance of the results of the work, not repeat them. A combined Results and Word section is often advisable. Avoid all-encompassing citations and discussion of published literature.

Conclusions
The principal conclusions of the study may exist presented in a short Conclusions department, which may stand alone or form a subsection of a Discussion or Results and Discussion department.

Appendices
If at that place is more i appendix, they should exist identified as A, B, etc. Formulae and equations in appendices should be given separate numbering: Eq. (A.1), Eq. (A.2), etc.; in a subsequent appendix, Eq. (B.1) and so on. Similarly for tables and figures: Table A.1; Fig. A.1, etc.

Essential championship page information

Title. Concise and informative. Titles are often used in information-retrieval systems. Avoid abbreviations and formulae where possible.
Author names and affiliations. Please clearly point the given name(s) and family unit proper noun(s) of each author and check that all names are accurately spelled. You can add your proper name betwixt parentheses in your ain script behind the English transliteration. Present the authors' affiliation addresses (where the actual piece of work was done) below the names. Indicate all affiliations with a lower-case superscript letter of the alphabet immediately later the author's name and in front of the appropriate address. Provide the full postal accost of each amalgamation, including the country proper noun and, if bachelor, the e-mail address of each author.
Corresponding writer. Conspicuously indicate who will handle correspondence at all stages of refereeing and publication, also post-publication. This responsibility includes answering any future queries well-nigh Methodology and Materials. Ensure that the e-mail accost is given and that contact details are kept upward to engagement past the corresponding author.
Nowadays/permanent address. If an author has moved since the piece of work described in the article was done, or was visiting at the time, a 'Present address' (or 'Permanent accost') may be indicated equally a footnote to that author's name. The address at which the author really did the piece of work must be retained every bit the primary, amalgamation address. Superscript Arabic numerals are used for such footnotes.

Highlights

Highlights are optional yet highly encouraged for this journal, as they increment the discoverability of your article via search engines. They consist of a short collection of bullet points that capture the novel results of your research besides as new methods that were used during the study (if any). Please accept a look at the examples here: example Highlights.

Highlights should be submitted in a split editable file in the online submission system. Delight use 'Highlights' in the file name and include iii to 5 bullet points (maximum 85 characters, including spaces, per bullet point).

Abstruse

A curtailed and factual abstract is required. The abstruse should country briefly the purpose of the enquiry, the master results and major conclusions. An abstruse is often presented separately from the article, so it must be able to stand up alone. For this reason, References should be avoided, but if essential, then cite the author(s) and yr(s). Besides, not-standard or uncommon abbreviations should be avoided, but if essential they must be defined at their starting time mention in the abstract itself.

Keywords

Immediately later on the abstract, provide a maximum of half dozen keywords, using American spelling and fugitive general and plural terms and multiple concepts (avoid, for instance, 'and', 'of'). Be sparing with abbreviations: just abbreviations firmly established in the field may be eligible. These keywords will exist used for indexing purposes.

Abbreviations
Define abbreviations that are not standard in this field in a footnote to exist placed on the showtime folio of the commodity. Such abbreviations that are unavoidable in the abstruse must be defined at their outset mention there, also as in the footnote. Ensure consistency of abbreviations throughout the article.

Acknowledgements
Collate acknowledgements in a separate section at the end of the commodity before the references and do non, therefore, include them on the championship page, as a footnote to the championship or otherwise. List here those individuals who provided help during the enquiry (e.g., providing language help, writing assist or proof reading the article, etc.).

Formatting of funding sources
Listing funding sources in this standard way to facilitate compliance to funder's requirements:

Funding: This work was supported by the National Institutes of Wellness [grant numbers xxxx, yyyy]; the Bill & Melinda Gates Foundation, Seattle, WA [grant number zzzz]; and the U.s.a. Institutes of Peace [grant number aaaa].

It is not necessary to include detailed descriptions on the program or blazon of grants and awards. When funding is from a block grant or other resources available to a academy, college, or other enquiry establishment, submit the proper noun of the institute or organization that provided the funding.

If no funding has been provided for the inquiry, it is recommended to include the following judgement:

This inquiry did not receive any specific grant from funding agencies in the public, commercial, or not-for-profit sectors.

Units
Follow internationally accepted rules and conventions: use the international system of units (SI). If other units are mentioned, please give their equivalent in SI.

Math formulae
Please submit math equations as editable text and not as images. Nowadays simple formulae in line with normal text where possible and use the solidus (/) instead of a horizontal line for minor fractional terms, eastward.thousand., X/Y. In principle, variables are to be presented in italics. Powers of due east are oftentimes more conveniently denoted by exp. Number consecutively any equations that have to be displayed separately from the text (if referred to explicitly in the text).

Footnotes
Footnotes should exist used sparingly. Number them consecutively throughout the commodity. Many discussion processors build footnotes into the text, and this feature may be used. Should this not exist the case, point the position of footnotes in the text and present the footnotes themselves separately at the end of the article.

Artwork

Electronic artwork
General points
• Make certain y'all use uniform lettering and sizing of your original artwork.
• Preferred fonts: Arial (or Helvetica), Times New Roman (or Times), Symbol, Courier.
• Number the illustrations according to their sequence in the text.
• Apply a logical naming convention for your artwork files.
• Indicate per figure if it is a single, 1.v or 2-column fitting image.
• For Give-and-take submissions only, y'all may still provide figures and their captions, and tables within a unmarried file at the revision stage.
• Please annotation that individual figure files larger than 10 MB must be provided in separate source files.

A detailed guide on electronic artwork is available.
You are urged to visit this site; some excerpts from the detailed information are given here.
Formats
Regardless of the application used, when your electronic artwork is finalized, delight 'salvage as' or catechumen the images to one of the post-obit formats (notation the resolution requirements for line drawings, halftones, and line/halftone combinations given below):
EPS (or PDF): Vector drawings. Embed the font or save the text equally 'graphics'.
TIFF (or JPG): Colour or grayscale photographs (halftones): always use a minimum of 300 dpi.
TIFF (or JPG): Bitmapped line drawings: utilize a minimum of 1000 dpi.
TIFF (or JPG): Combinations bitmapped line/one-half-tone (color or grayscale): a minimum of 500 dpi is required.
Please do not:
• Supply files that are optimized for screen use (e.grand., GIF, BMP, PICT, WPG); the resolution is likewise low.
• Supply files that are too depression in resolution.
• Submit graphics that are disproportionately big for the content.

Color artwork
Please make sure that artwork files are in an adequate format (TIFF (or JPEG), EPS (or PDF) or MS Role files) and with the correct resolution. If, together with your accepted article, y'all submit usable colour figures then Elsevier will ensure, at no additional accuse, that these figures will announced in color online (e.m., ScienceDirect and other sites) in improver to color reproduction in print. Farther information on the training of electronic artwork.

Figure captions
Ensure that each analogy has a caption. A explanation should incorporate a brief title (not on the effigy itself) and a description of the illustration. Keep text in the illustrations themselves to a minimum just explicate all symbols and abbreviations used.

Tables

Please submit tables as editable text and not equally images. Tables can exist placed either next to the relevant text in the article, or on separate page(s) at the end. Number tables consecutively in accordance with their appearance in the text and identify any table notes below the table torso. Exist sparing in the apply of tables and ensure that the information presented in them do not duplicate results described elsewhere in the article. Please avert using vertical rules and shading in table cells.

References

Citation in text
Delight ensure that every reference cited in the text is as well present in the reference list (and vice versa). Any references cited in the abstract must be given in full. Unpublished results and personal communications are not recommended in the reference list, but may be mentioned in the text. If these references are included in the reference list they should follow the standard reference style of the periodical and should include a substitution of the publication date with either 'Unpublished results' or 'Personal advice'. Citation of a reference equally 'in press' implies that the item has been accustomed for publication.

Reference links
Increased discoverability of research and high quality peer review are ensured past online links to the sources cited. In guild to permit usa to create links to abstracting and indexing services, such as Scopus, CrossRef and PubMed, delight ensure that information provided in the references are correct. Delight annotation that incorrect surnames, journal/volume titles, publication yr and pagination may prevent link creation. When copying references, please be conscientious as they may already contain errors. Use of the DOI is highly encouraged.

A DOI is guaranteed never to alter, so you can use it as a permanent link to any electronic article. An case of a citation using DOI for an commodity not however in an upshot is: VanDecar J.C., Russo R.One thousand., James D.E., Ambeh W.B., Franke Yard. (2003). Aseismic continuation of the Lesser Antilles slab below northeastern Venezuela. Journal of Geophysical Inquiry, https://doi.org/10.1029/2001JB000884. Please note the format of such citations should be in the same style as all other references in the paper.

Spider web references
As a minimum, the full URL should be given and the date when the reference was last accessed. Whatsoever further information, if known (DOI, author names, dates, reference to a source publication, etc.), should also be given. Web references can be listed separately (e.g., after the reference list) under a dissimilar heading if desired, or tin can be included in the reference list.

Data references
This journal encourages you to cite underlying or relevant datasets in your manuscript by citing them in your text and including a information reference in your Reference List. Data references should include the post-obit elements: author name(s), dataset championship, data repository, version (where available), twelvemonth, and global persistent identifier. Add [dataset] immediately before the reference and so we tin can properly identify it as a data reference. The [dataset] identifier will not appear in your published article.

References in a special issue
Please ensure that the words 'this issue' are added to any references in the list (and any citations in the text) to other manufactures in the same Special Issue.

Reference direction software
Virtually Elsevier journals have their reference template available in many of the most popular reference direction software products. These include all products that support Citation Style Language styles, such as Mendeley. Using citation plug-ins from these products, authors simply demand to select the appropriate journal template when preparing their commodity, later on which citations and bibliographies will be automatically formatted in the periodical's style. If no template is yet available for this periodical, please follow the format of the sample references and citations as shown in this Guide. If you employ reference management software, please ensure that you remove all field codes before submitting the electronic manuscript. More information on how to remove field codes from different reference direction software.

Reference formatting
At that place are no strict requirements on reference formatting at submission. References can exist in any style or format as long as the style is consistent. Where applicable, author(due south) name(s), journal championship/book championship, chapter title/article title, year of publication, book number/book chapter and the article number or pagination must be nowadays. Use of DOI is highly encouraged. The reference style used by the journal will be applied to the accepted article by Elsevier at the proof stage. Note that missing data will be highlighted at proof stage for the author to right. If you lot do wish to format the references yourself they should be arranged co-ordinate to the following examples:

Reference manner
Text: Indicate references by number(south) in square brackets in line with the text. The actual authors can be referred to, but the reference number(s) must always be given.
Case: '..... as demonstrated [3,6]. Barnaby and Jones [8] obtained a different result ....'
List: Number the references (numbers in square brackets) in the list in the gild in which they appear in the text.
Examples:
Reference to a periodical publication:
[ane] J. van der Geer, J.A.J. Hanraads, R.A. Lupton, The art of writing a scientific commodity, J. Sci. Commun. 163 (2010) 51–59. https://doi.org/ten.1016/j.Sc.2010.00372.
Reference to a periodical publication with an article number:
[two] J. van der Geer, J.A.J. Hanraads, R.A. Lupton, 2018. The art of writing a scientific article. Heliyon. 19, e00205. https://doi.org/ten.1016/j.heliyon.2018.e00205.
Reference to a book:
[three] Due west. Strunk Jr., Eastward.B. White, The Elements of Way, fourth ed., Longman, New York, 2000.
Reference to a affiliate in an edited book:
[iv] G.R. Mettam, 50.B. Adams, How to fix an electronic version of your commodity, in: B.S. Jones, R.Z. Smith (Eds.), Introduction to the Electronic Age, Due east-Publishing Inc., New York, 2009, pp. 281–304.
Reference to a website:
[v] Cancer Inquiry United kingdom of great britain and northern ireland, Cancer statistics reports for the UK. http://www.cancerresearchuk.org/aboutcancer/statistics/cancerstatsreport/, 2003 (accessed 13 March 2003).
Reference to a dataset:
[dataset] [six] M. Oguro, S. Imahiro, South. Saito, T. Nakashizuka, Mortality data for Japanese oak wilt illness and surrounding forest compositions, Mendeley Data, v1, 2015. https://doi.org/ten.17632/xwj98nb39r.1.
Reference to software:
[7] E. Coon, Chiliad. Berndt, A. Jan, D. Svyatsky, A. Atchley, Eastward. Kikinzon, D. Harp, G. Manzini, E. Shelef, Thou. Lipnikov, R. Garimella, C. Xu, D. Moulton, Due south. Karra, S. Painter, E. Jafarov, Due south. Molins, Avant-garde Terrestrial Simulator (ATS) v0.88 (Version 0.88), Zenodo, March 25, 2020. https://doi.org/x.5281/zenodo.3727209.

Journal abbreviations source
Journal names should exist abbreviated according to the Listing of Title Give-and-take Abbreviations.

Video

Elsevier accepts video material and blitheness sequences to support and enhance your scientific research. Authors who have video or blitheness files that they wish to submit with their article are strongly encouraged to include links to these within the torso of the article. This can be washed in the same way as a figure or table by referring to the video or animation content and noting in the torso text where it should be placed. All submitted files should be properly labeled so that they directly relate to the video file's content. In lodge to ensure that your video or animation material is directly usable, please provide the file in one of our recommended file formats with a preferred maximum size of 150 MB per file, 1 GB in total. Video and animation files supplied volition be published online in the electronic version of your commodity in Elsevier Web products, including ScienceDirect. Please supply 'stills' with your files: you lot can choose whatever frame from the video or animation or make a separate prototype. These will be used instead of standard icons and volition personalize the link to your video data. For more detailed instructions please visit our video education pages. Notation: since video and animation cannot exist embedded in the print version of the journal, please provide text for both the electronic and the impress version for the portions of the article that refer to this content.

Data visualization

Include interactive information visualizations in your publication and let your readers interact and engage more closely with your research. Follow the instructions hither to find out virtually bachelor information visualization options and how to include them with your article.

Supplementary cloth

Supplementary material such as applications, images and sound clips, can be published with your commodity to heighten information technology. Submitted supplementary items are published exactly as they are received (Excel or PowerPoint files will announced equally such online). Delight submit your material together with the article and supply a concise, descriptive explanation for each supplementary file. If you wish to make changes to supplementary cloth during any stage of the process, delight brand sure to provide an updated file. Practice not annotate any corrections on a previous version. Please switch off the 'Runway Changes' option in Microsoft Office files as these volition appear in the published version.

Inquiry data

This periodical encourages and enables you to share data that supports your research publication where appropriate, and enables you to interlink the data with your published articles. Research information refers to the results of observations or experimentation that validate enquiry findings. To facilitate reproducibility and data reuse, this journal likewise encourages you to share your software, lawmaking, models, algorithms, protocols, methods and other useful materials related to the project.

Below are a number of means in which you tin associate data with your article or make a statement well-nigh the availability of your information when submitting your manuscript. If you are sharing data in one of these ways, you are encouraged to cite the data in your manuscript and reference listing. Delight refer to the "References" section for more information about data citation. For more than information on depositing, sharing and using research data and other relevant inquiry materials, visit the inquiry data page.

Information linking
If y'all have made your research data available in a data repository, y'all tin link your article direct to the dataset. Elsevier collaborates with a number of repositories to link articles on ScienceDirect with relevant repositories, giving readers access to underlying data that gives them a better agreement of the research described.

At that place are different means to link your datasets to your article. When available, you lot tin can directly link your dataset to your article past providing the relevant information in the submission system. For more information, visit the database linking page.

For supported data repositories a repository banner will automatically appear next to your published article on ScienceDirect.

In addition, yous can link to relevant data or entities through identifiers within the text of your manuscript, using the post-obit format: Database: xxxx (east.g., TAIR: AT1G01020; CCDC: 734053; PDB: 1XFN).

Mendeley Data
This journal supports Mendeley Data, enabling you to deposit any research data (including raw and processed data, video, code, software, algorithms, protocols, and methods) associated with your manuscript in a free-to-use, open access repository. During the submission procedure, after uploading your manuscript, you volition have the opportunity to upload your relevant datasets directly to Mendeley Data. The datasets volition be listed and direct accessible to readers next to your published commodity online.

For more information, visit the Mendeley Data for journals page.

Data argument
To foster transparency, we encourage you to country the availability of your data in your submission. This may be a requirement of your funding trunk or institution. If your information is unavailable to access or unsuitable to mail, you will have the opportunity to betoken why during the submission process, for example past stating that the inquiry data is confidential. The statement will appear with your published article on ScienceDirect. For more information, visit the Information Statement folio.

Online proof correction

To ensure a fast publication procedure of the article, we kindly ask authors to provide us with their proof corrections inside ii days. Corresponding authors will receive an email with a link to our online proofing system, allowing annotation and correction of proofs online. The surround is like to MS Give-and-take: in improver to editing text, you can besides comment on figures/tables and answer questions from the Copy Editor. Web-based proofing provides a faster and less error-prone process past allowing you to directly type your corrections, eliminating the potential introduction of errors.
If preferred, you can however cull to annotate and upload your edits on the PDF version. All instructions for proofing will exist given in the e-mail we send to authors, including alternative methods to the online version and PDF.
We will do everything possible to go your article published quickly and accurately. Delight use this proof just for checking the typesetting, editing, completeness and correctness of the text, tables and figures. Significant changes to the article as accepted for publication will just be considered at this stage with permission from the Editor. It is of import to ensure that all corrections are sent back to us in 1 communication. Please check carefully before replying, as inclusion of any subsequent corrections cannot be guaranteed. Proofreading is solely your responsibility.

Offprints

The corresponding writer will, at no toll, receive a customized Share Link providing l days costless access to the final published version of the commodity on ScienceDirect. The Share Link tin be used for sharing the article via any communication channel, including email and social media. For an extra charge, paper offprints can exist ordered via the offprint guild form which is sent once the article is accepted for publication. Both corresponding and co-authors may order offprints at any time via Elsevier's Author Services. Corresponding authors who accept published their commodity gold open up admission exercise not receive a Share Link as their final published version of the article is bachelor open access on ScienceDirect and can be shared through the article DOI link.

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Source: https://www.elsevier.com/journals/materials-science-in-semiconductor-processing/1369-8001/guide-for-authors

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